사업소개

FMM AOI Spec.

• 1. Substrate Size: ½ 6G
• 2. AOI Camera System :3~7um Resolution TDI Sensor
• 3. Tact Time : 200sec/Mask (½ 6G Case)
ⓛ AOI Inspection
• 4. Optional Repair Unit
ⓛ UV QCW Laser for Defect Burning
② nS Pulse Laser

FMM AOI Process → Defect Detection

FMM AOI Process → Macro Detection

Pattern Shift(Align), Apheun Inspection

SMEC Inspector System.

Inspection Flow

• Compute Unified Device Architecture
• GPGPU Access Platform
• Hardware
• NVIDIA GPGPU Board